MS00600 - SEMI MS6 - Guide for Design and Materials for Interfacing Microfluidic Systems StdPbc-1017 本安全ガイドラインは，global Environmental Health & Safety

本安全ガイドラインは，global Environmental Health & Safety Technical Committeeで技術的に承認されている。現版は2011年12月24日，global Audits and Reviews Subcommitteeにて発行が承認された。2012年3月にwww

This Guide also addresses the universal alignment mark where the outcome will be a feasible photo alignment standard

and some are additionally capable of measuring surface nanotopography

This Document references SEMI E78

Performance-Based Equipment Training (PBET) improves the likelihood that the workforce of semiconductor equipment owners can successfully install

MS00600 - SEMI MS6 - Guide for Design and Materials for Interfacing Microfluidic Systems StdPbc-1017 本安全ガイドラインは，global Environmental Health & SafetyThis standard was technically approved by the global MEMS Committee. This edition was approved for publication by the global Audits & Reviews Subcommittee on December 20, 2007. It was available at www. semi. org in February 2008. This document provides guidelines for general fluidic interface design and materials selection that can reduce redundant engineering effort and lead to improved design, manufacturability, and operation. Referenced SEMI